| Name | Description | Administer |
|---|---|---|
| Group: 3D_Characterization_Lab | ||
| Calit2_AFM | Atomic Force Microscope - 1301 Calit2 Building | |
| FEI_Magellan_400_XHR_SEM | High Resolution SEM - 1302 Calit2 Building | |
| FEI_Quanta_3D_FEG_FIB | SEM and FIB Dual Beam - 1302 Calit2 Building | |
| Rigaku_Smartlab_XRD | X-ray Characterization and Analysis - 1302 Calit2 Building | |
| Rigaku_Ultima3_XRD | X-ray Characterization and Analysis - 1302 Calit2 Building | |
| SBT_Grinder | Grinding and Polishing Wheel - 1302 Calit2 Building | |
| SBT_Plasma_Cleaner | Plasma Cleaner (O2 or Ar) - 1302 Calit2 Building | |
| SBT_Slow_Speed_Saw | Slow Speed Saw -1302 Calit2 Building | |
| SBT_Sputter_Coater | Sputter Coating, Ion Etching/Polishing - 1302 Calit2 Building | |
| Vibrometer | Vibrometer - 1322 Calit2 Building | |
| Workstation_Rigaku_FEI | Workstation computer for data analysis_Lexi 1302 | |
| Group: Nano_Metrology | ||
| Nano_CT | X-ray Nano_CT in 1301 Calit2 | |